Our profile thermocouples are designed for both vertical and horizontal furnace configurations. They are compatible with a wide range of leading furnace brands, including ASM, TEL, Kokusai, BTI/Tempress, Centrotherm, MRL, SVCS, Aviza/SVG/Thermco, and Tystar. Each sensor is constructed to provide precise multi-point temperature profiling, enabling detailed thermal mapping essential for uniform wafer processing and optimal device yield.
Multi-point Sensing: Enables accurate temperature mapping along the length of the furnace for superior process control.
Custom and Standard Designs: Available in various shapes, sizes, calibrations, and materials to meet specific process requirements.
Contamination Control: Manufactured with strict precautions to prevent contamination and ensure material compatibility with sensitive semiconductor processes.
Quality Assurance: All products are subject to rigorous quality checks and are manufactured to meet the highest industry standards.
Semiconductor Profile Thermocouples
Our profile thermocouples stand out by offering multi-point, high-accuracy temperature monitoring, robust construction, and custom solutions-delivering superior process insight and long-term value compared to standard alternatives.
Specialized temperature sensors designed for use in semiconductor diffusion furnaces. Featuring both multi-point (profile) and single-point (spike) options, these thermocouples are made from ultra-pure materials to deliver precise, reliable temperature readings while minimizing contamination risks. Customizable to fit different furnace models, they help maintain consistent wafer processing and support high-quality semiconductor manufacturing.
Multiple sensing locations within a single probe for detailed temperature mapping
Tailored designs to fit your process requirements
Durable construction using premium materials
Certified calibration for dependable, accurate readings
Key Features
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