Semiconductor Profile Thermocouples

Our profile thermocouples stand out by offering multi-point, high-accuracy temperature monitoring, robust construction, and custom solutions-delivering superior process insight and long-term value compared to standard alternatives.

Specialized temperature sensors designed for use in semiconductor diffusion furnaces. Featuring both multi-point (profile) and single-point (spike) options, these thermocouples are made from ultra-pure materials to deliver precise, reliable temperature readings while minimizing contamination risks. Customizable to fit different furnace models, they help maintain consistent wafer processing and support high-quality semiconductor manufacturing.

  • Multiple sensing locations within a single probe for detailed temperature mapping

  • Tailored designs to fit your process requirements

  • Durable construction using premium materials

  • Certified calibration for dependable, accurate readings

Key Features

Our profile thermocouples are designed for both vertical and horizontal furnace configurations. They are compatible with a wide range of leading furnace brands, including ASM, TEL, Kokusai, BTI/Tempress, Centrotherm, MRL, SVCS, Aviza/SVG/Thermco, and Tystar. Each sensor is constructed to provide precise multi-point temperature profiling, enabling detailed thermal mapping essential for uniform wafer processing and optimal device yield.

Multi-point Sensing: Enables accurate temperature mapping along the length of the furnace for superior process control.
Custom and Standard Designs: Available in various shapes, sizes, calibrations, and materials to meet specific process requirements.
Contamination Control: Manufactured with strict precautions to prevent contamination and ensure material compatibility with sensitive semiconductor processes.
Quality Assurance: All products are subject to rigorous quality checks and are manufactured to meet the highest industry standards.

Contact our experts
Louisa DeGroen
Global Sales Manager for Semiconductor Products
Pamela Celi
Account Manager, Semiconductors